Vacuum laminating apparatus and method

ABSTRACT

A vacuum laminating apparatus includes a laminating space formed by a base member, a tube having deaeration holes, and a flexible lid member. A vacuum laminating method places the material to be laminated within the laminating space and heats the material while creating a vacuum in the space.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a vacuum laminating apparatus andmethod, and more particularly to a vacuum laminating apparatus andmethod which is applicable to, e.g., a manufacturing system for thesolar cell module.

2. Related Background Art

Conventionally, a vacuum laminating apparatus was applied as a finalmanufacturing system for the purpose of covering the elements exposed inuse to the outer atmosphere, such as semiconductor devices, inparticular, solar cells. This was conducted to enhance the durability ofsuch elements against the temperature/humidity and the externalpressure.

FIGS. 17 and 18 show the material constitution of a solar cell module inthe state where the materials are laminated and the state where thesolar cell module is completed, respectively. In these figures, 1701 isa surface covering material, 1702 is a filler, 1703 is a solar cellelement, and 1704 is a back covering material.

As one procedure of making a solar cell module, a material constitutingthe solar cell module is first laid down within a vacuum apparatus, anda vacuum is created to evacuate the air from between materials, orperform the so-called deaeration. Then, the materials are heated in thisvacuum state. Due to heating, the temperature of material will rise upto a temperature for allowing the filler to be bridged or cured, thistemperature being retained for a predetermined time until the filler isfully cured. Thereafter, the materials are cooled, and placed inatmospheric pressure again by stopping to pull the vacuum. With thisprocedure, the solar cell with a constitution as shown in FIG. 18 iscompleted.

FIGS. 20 to 22 are views for explaining the construction of a vacuumlaminating apparatus which is applicable to a conventional manufacturingsystem for the solar cell module. FIG. 20 is an overall view, FIG. 21 isa cross-sectional structural view of FIG. 20, and FIG. 22 is across-sectional structural view in making the solar cell module. Inthese figures, 701 is a main body lid portion, 702 is a main body, 703is a vacuum pump for the main body lid portion, 704 is a vacuum pump forthe main body, 705 is a silicone rubber, 706 is a base, 707 is a heater,and 708 is a solar cell module component material.

A procedure of making a solar cell module in a vacuum laminatingapparatus for the solar cell module as above described is as follows.First, as shown in FIG. 20, the solar cell module component material 708is placed on the base 706 within the main body 702 which is opened.Then, the vacuum pump 703 for the main body lid portion is activated tocreate a vacuum in the main body lid portion. And after the main bodylid portion 701 is closed, the vacuum pump 704 for the main body isactivated to evacuate the main body of the air. When the main body lidportion 701 and the main body 702 become stable at the respectivedegrees of vacuum (with a vacuum meter not shown), the vacuum pump 703for the main body lid portion is stopped to return the inside of themain body lid portion to atmospheric pressure. And the heater 707 isactivated to raise the temperature up to a predetermined value, at whichvalue the temperature is retained for a predetermined time, and thenstopped to allow the cooling. If the cooling is fully achieved, thevacuum pump 704 for the main body is stopped to return the inside of themain body to atmospheric pressure, so that the solar cell module asshown in FIG. 18 is completed. Herein, the predefined temperaturecondition with the heater 707 involves a temperature at which the fillerin the solar cell module component material can be cured or bridged.Also, the set time for maintaining such high temperature is a time forthe filler to be completely cured or bridged.

However, this conventional vacuum laminating apparatus of the solar cellmodule is very heavy in weight, with poor operation efficiency, sincethe main body 702 and the main body lid portion 701 are made of metal.Also, owing to a great heat capacity of the base 706 within the mainbody, the temperature of the solar cell module component material 708quite slowly rises or falls, even if the heater 707 is operated,resulting in longer time of heat treatment. Further, among the solarcells, an amorphous silicone solar cell is well suited to theconstitution of larger area, but this conventional vacuum laminatingapparatus for the solar cell module, having the above-mentionedstructure, has a problem that it is difficult to easily construct thelarger apparatus to produce the solar cell module with the larger area.

An object of the present invention is to provide a vacuum laminatingapparatus and method which is simple in structure, and is capable ofmaking the larger area, with the shorter processing time.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a perspective view showing a vacuum laminating apparatus ofthe present invention.

FIG. 2 is a cross-sectional view of FIG. 1, taken along 2--2.

FIG. 3 is a view further having a net in FIG. 2.

FIG. 4 is a view for explaining the effect of the net.

FIGS. 5, 6 and 7 are views showing the examples of the net.

FIG. 8 is a view for defining the position of hole.

FIG. 9 is a view showing a measuring device for the degree of vacuum.

FIG. 10 is a graphical view representing the relation between theposition of a deaeration hole and the degree of vacuum.

FIG. 11 is a view showing a steep bend of a lid member.

FIGS. 12 and 15 are views further having a cushioning material in FIG.3.

FIGS. 13 and 14 are views showing the examples of the cushioningmaterial.

FIG. 16 is a view for explaining the usage of the apparatus of theinvention.

FIGS. 17 and 18 are conventional solar cell modules.

FIG. 19 shows a combination of a plurality of apparatuses of theinvention.

FIG. 20 is a conventional laminating apparatus.

FIG. 21 is a cross-sectional view of the apparatus of FIG. 20.

FIG. 22 is a view showing a conventional laminating method.

SUMMARY OF THE INVENTION

The present invention resides in a vacuum laminating apparatus in whicha laminating space is formed of a base member, a tube having adeaeration hole, and a flexible lid member. If this apparatus is usedfor lamination, the laminating operation becomes simple, because theapparatus has a simple structure and light weight, and the processingtime can be shortened, because in the heat treatment the temperaturerises or falls rapidly, due to a small heat capacity of the apparatus.

Further, with a net disposed over the entire surface between the lidmember and the base member, a space for ventilation can be securelyprovided between the lid member and the base member, thereby making itpossible to sufficiently create the vacuum.

Further, since the angle made by the straight line connecting the centerof the tube to the deaeration hole with respect to the vertical planeranges from 0 to 90 degrees, the deaeration hole is less likely to beclosed with the lid member, thereby making it possible to sufficientlycreate the vacuum.

Also, the invention is characterized by comprising a cushioning materialdisposed along the inside of the tube, whereby the lid member is lesssusceptible to steep flexure by the vacuum.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

A vacuum laminating apparatus of the present invention will be describedwith reference to FIGS. 1 to 3.

(Base member)

A plate-like base member is a member making up the bottom portion of thevacuum laminating apparatus. The plate-like base member for use with amanufacturing system of the solar cell module in this applicationexample is required to have characteristics such as heat resistance,rigidity, light weight, and surface adhesiveness. The material used forthis member is mainly a metal such as iron and aluminum. To achieve thelight weight, this member must be thin, but can not be too thin, becauseit becomes less rigid. Preferably, an iron plate having a thickness of1.5 to 2.0 mm is used. In some case, a barrel tube 102 may be adheredwith a sealant. Hence, the surface is preferably chemically treated withphosphate to improve the adhesive property.

(Tube)

The barrel tube 102 is a tube for creating the vacuum. A space portion108 in which the vacuum is created is made up of the base member 101 andthe lid member 107 which is laid thereon. The characteristics requiredfor this barrel tube 102 include heat resistance, rigidity and lightweight. The material is mainly stainless. The shape of the tube may becircle or polygon in cross section. The deaeration holes 105 forcreating the vacuum provided on the lateral face of the barrel tube 102and along the inner periphery thereof are desirably opened beforeassembling the vacuum laminating apparatus. In some cases, the barreltube 102 may be adhered onto the plate-like base member 101. In suchcases, the barrel tube 102 is preferably treated for deaeration beforethe adhesion. The size thereof is such that an outer frame of an annularbody can be accommodated within the plate-like base member 101. Thereare also provided an opening portion 103a for connecting the vacuum pumpfor pulling the vacuum and a valve 103.

The deaeration holes 105 are useful for deaeration in creating thevacuum, and provided on the side of the barrel tube 102 facing thespace, i.e., along the inside of the annular body. Around the entirearea of the barrel tube 102 on the side of the space for creating thevacuum, i.e., along the four sides of the annular body which is madesubstantially quadrilateral, the deaeration holes are providedpreferably at an equal interval before the annular body is secured tothe plate-like base member 101.

(Securing member)

A securing member is one for securing the barrel tube 102 withoutyielding the clearance between the barrel tube 102 and the plate-likebase member 101. Since this apparatus is subjected to high temperaturesin the manufacturing process for solar cell modules, while beingmaintained in the vacuum state, the securing member 106 is required tohave the heat resistance. The methods of securing include securing byfilling a sealant in the clearance between the barrel tube 102 and theplate-like base member 101, in addition to securing by welding. Forexample, an RTV curable type silicone sealant can be used.

(Lid member)

The lid member 107 creates the space 108 in which the vacuum is createdtogether with the barrel tube and the plate-like base member. And whencreating the vacuum, it presses down the component material 110 of thesolar cell module to promote deaeration through the component material.The lid member 107 should be sufficiently larger than the outer frame ofthe annular body. The characteristics required for the lid member 107include heat resistance, flexibility, light weight and the airtightnessin pulling the vacuum. The material for use is preferably siliconeresin, the shape thereof being sheet-like.

(Net)

The net 109 is disposed between the plate-like base member 101 and thelid member 107 in the laminating space portion, as shown in FIG. 3, toprevent the contact between the plate-like base member 101 and the lidmember 107 to shut off the flow of the air. This is shown in FIG. 4. 110is a material treated for lamination. This material is identical inshape and size to the internal configuration of the annular body formedof the barrel tube 102. The characteristics required include heatresistance, flexibility, and light weight. The materials include ametallic net made of e.g. stainless or aluminum, and a net made of heatresistant resin fiber such as polyester.

FIGS. 5 to 7 represent the specific examples of the net 109. FIG. 5shows a plain woven type, FIG. 6 shows a twisted woven type, and FIG. 7shows a plain mat woven type. The net is sandwiched between theplate-like base member and the lid member, and desirably has the abilityof sufficiently passing the flow of the air, without being squashed,even if subjected to pressures in creating the vacuum. Also, the net issheet-like in shape, with less surface irregularities, and desirably hasno effect on the shape of the solar cell module after being laminated.

(Position of deaeration hole)

FIG. 8 shows the position of the deaeration hole. In FIG. 8, 801 is abarrel tube, 802 is a base member, 803 is a vertical plane of the basemember, and 804 is a deaeration hole. 805 indicates an angle θ made bythe line connecting the center of the tube and the deaeration hole withrespect to the vertical plane. By this angle θ is defined a "position ofdeaeration hole".

FIG. 9 shows the cross section of a jig used to measure the degree ofvacuum within a laminating space when the angle θ is changed. In FIG. 9,901 is a lid member, 902 is a barrel tube, 903 is a securing member, 904is a plate-like base member, 905 is a net, and 906 is a vacuum gauge.Although not shown in FIG. 9, there is provided an opening portion as inFIG. 1, to which a valve is connected, the valve connecting to a vacuumpump. As used in measuring the degree of vacuum in FIG. 9, the lidmember 901 was silicone rubber having a size of 1000×1600 mm (thickness;2 t, hardness; 50, general-purpose type, made by Tigerspolymer), thebarrel tube 902 was a stainless tube having an outer diameter of900×1500 mm (stainless 316BA, with a tube diameter of 1/2 inch), thesecuring member 903 was an RTV silicone type sealant (trade mark"KE347"; made by Shinetsu Silicone Co.), the plate-like base member 904was a weatherproofing steel plate having a size of 1000×1600 mm (e.g.,trade mark "Bonde Steel Plate" made by Shin-Nippon Steel Co.,surface-treated with phosphate, 1.6 t), and the net 905 was an SUS wirenetting (diameter of wire; 0.4 mm, 20×20 mesh, degreased, made by TaiyoWiring Net). In this vacuum jig, a deaeration hole was 3 mm in diameter,and was provided on all the four sides of the barrel tube at a pitch of50 mm. Also, the vacuum pump (not shown) had a capacity of 135 m³ /min.

The results of measuring the degree of vacuum when θ is changed isrepresented in FIG. 10. Each measurement point indicates the degree ofvacuum two minutes after starting to pull the vacuum.

It will be seen that the degree of vacuum is best when θ is near 45°,and less effective when closer to 0° or 90°. Because if the angle ofelevation of the deaeration hole as looked from the vertical plane ofthe base member approaches 0°, the deaeration hole is closed by theplate-like base member, increasing the air resistance in pulling thevacuum. Also, if it approaches 90°, it is closed by the lid member.Accordingly, the position of the deaeration hole is preferably about45°.

(Cushioning member)

As shown in FIG. 11, in creating the vacuum, a portion of the lid member107 in contact with the barrel tube 102 may be bent at an acute angle.Herein, the lid member is used in an abruptly raised state at G in thefigure, i.e., an extremely bent state. If it is continued to be use inthis state, a crack is more likely to occur at the bent portion of theacute angle due to repeated temperature stresses for the long term. As aresult, there will occur the leakage to cause a failure of deaerationthrough the solar cell component material, with bubbles left within thesolar cell module, resulting in bad appearance.

Thus, if the cushioning member 111 is placed in contact with the insideof the annular body for the barrel tube 102, as shown in FIG. 12, thelid member 107 can be prevented from being bent at the extremely acuteangle on the portion in contact with the barrel tube 102. Thecharacteristics required for the cushioning member 111 include heatresistance and light weight.

FIGS. 13 and 14 show examples of the cushioning member 111. FIG. 13shows a cushioning member like a plate which is bent as an L-character,which is disposed along the barrel tube 102 as shown in FIG. 12, therebypreventing the lid member 107 from rising up at an acute angle. Also,FIG. 14 shows a cushioning member of a net folded over to be thicker,which is disposed along the barrel tube 102 as shown in FIG. 15, therebypreventing the lid member 107 from rising up at an acute angle. In thecase of the cushioning member having the net folded over as in FIGS. 14and 15, the air flow passage for the deaeration can be sufficientlysecured, having the advantage that the conductance will not become toosmall. It is desired that the cushioning member as shown in FIGS. 13 and14 is worked in thickness and shape such that the lid member maygradually rise with the diameter of the barrel tube.

EXAMPLES Apparatus Example 1

This example describes a method of making an apparatus as shown inFIGS. 1. First, a barrel tube 102 forming a laminating space is placedon a plate-like base member 101. Then, a securing material 106 is flowedin from the outside (on the side opposite the space for pulling thevacuum) to fill the clearance between the barrel tube 102 and theplate-like base member 101. Herein, the plate-like base member 101 was aweatherproofing steel plate having a size of 900×1500 mm (e.g., trademark "Bonde Steel Plate" made by Shin-Nippon Steel, surface-treated withphosphate, 1.6 t), the barrel tube 102 was a stainless tube having anouter diameter of annular body of 800×1400 mm (stainless 316BA, with atube diameter of 1/2 inch), the deaeration holes having a hole diameterof 3 mm were provided on all the four sides of the barrel tube at apitch of 50 mm, and the securing material was an RTV silicone typesealant (trade mark "KE347"; made by Shinetsu Silicone Co.). And thisapparatus was left for 24 hours in the atmosphere within room to curethe RTV silicone type sealant to secure the barrel tube 102 on theplate-like base member.

Example 2

This example describes a method of making an apparatus as shown in FIG.3 in which a net is provided within a laminating space. After securingthe barrel tube to the base member with the securing material in example1, the net of plain woven type having a size of 800×1400 mm (SUS wirenetting; wire diameter of 0.4 mm, 20×20 mesh, treated with trichlene,made by Taiyo Wiring Net) was laid on the base member.

Example 3

This example describes a method of making an apparatus in which acushioning member of FIG. 12 is provided to suppress the lid member frombeing bent at an acute angle. After laying a net thereon in example 2,the cushioning member 111 was made of a band-like member by folding asteel plate (as an L-character in cross section) having a thickness 0.8mm (trade name; timer color GL; made by Daido Steel Sheet). Then, twoband-like members having a length of 750 mm and two band-like membershaving a length of 1350 mm were prepared and disposed along the insideof the barrel tube (on the side of pulling the vacuum).

EXAMPLES Laminating Method Example 1

A method for laminating a solar cell module with a vacuum laminatingapparatus of the present invention is described. FIG. 16 is across-sectional view of the solar cell module disposed in a laminatingspace within the apparatus of the invention. In this example, thedeaeration holes 105 are directed downwardly at 45° with respect to thehorizontal, and a net 109 is provided. 112 is a solar cell modulecomponent material, and 113 is a filler flow preventing member forpreventing leakage of the filler which is filled around the solar cellmodule component material. In this application example, these parts aresubjected to lamination.

A procedure of making the solar cell module using the laminatingapparatus of the example is described below. The filler flow preventingmember 113 is placed in a space portion for pulling the vacuum withinthe laminating apparatus, the solar cell module component material 112is disposed thereon, and further the filler flow preventing member 113is placed thereon. After preparing them, the lid member 107 covers theentire annular body of the barrel tube 102.

Herein, the filler flow preventing member 113 used is a PTFE film (madeby Asahi Glass). Also, the lid member 107 used a silicone rubber havinga size of 1000×1600 mm (thickness; 2 t, hardness; 50, silicone resingeneral-purpose type, made by Tigerspolymer).

After the completion of preparing the abovementioned members, a vacuumpump 104 was started to create the vacuum into the laminating space 108to exhaust and deaerate the air therefrom. In the deaerating state withthe vacuum pump, the vacuum laminating apparatus was placed in ahigh-temperature oven, not shown, to elevate the temperature up to avalue (about 150° C.) at which the filler in the material constitutingthe solar cell module was cured, and held for 30 minutes until thecuring was ended. Thereafter, the apparatus was taken out from the oven,and cooled, and the vacuum pump was stopped to return the space portionto atmospheric pressure. With this procedure, the solar cell module wasfabricated.

The constitution of the solar cell module was the same as theconventional ones. In FIG. 17, 1701 is a surface covering material, 1702is a filler, 1703 is a solar cell element, and 1704 is a back coveringmaterial. The surface covering material 1701 used was a fluororesin filmhaving a size of 500×1400 mm (trade mark "Non-drawable Tefzel"; made byE.I. du Pont, thickness; 50 μm), the filler 1702 used was EVA having asize of 500×1400 mm (trade mark "Weatherproofing grade"; made by HisheetIndustries, thickness; 460 μm), and the back covering material 1704 usedwas a weatherproofing coated steel plate having a size of 500×1400 mm(trade mark "Timer Color GL; made by Daido Steel Sheet, 0.4 t). Thesolar cell element 1703 used was an amorphous silicon solar celldeposited on a stainless substrate.

With the above procedure, a solar cell module having a size of 500×1400mm was fabricated using the vacuum laminating apparatus of this exampleand the solar cell element as above mentioned.

Example 2

This variation is one in which a plate-like base member 101, a barreltube 102, and a lid member 107 were enlarged in the above applicationexample. The plate-like base member 101 was as large as 1200×5700 mm,the barrel tube 102 had an outer dimension of an annular body of1150×5650 mm, and the lid member 107 used a silicone rubber as large as1300×5800 mm, the barrel tube 102 of the annular body being 3/4 inch intube diameter. Also, the size of the solar cell component material wassuch that each of the surface covering material, the filler, and theback covering material was 800×5400 mm. A solar cell module having alarge area of 800×5400 mm was fabricated in the same way as in the aboveapplication example, except for the abovementioned points of variation.

With the apparatus of the present invention, the uniform lamination wasenabled without bubbles mixed inside even in the laminating process oflarge area as above described. Also, no big vacuum vessel was necessary.

Example 3

This variation is one in which three vacuum laminating apparatuses usedin the above application example were prepared and arranged one over theother, and directly entered into an oven at the same time, to fabricatethree solar cell modules through the heat treatment at a time. FIG. 19shows the three vacuum laminating apparatuses which are installed on apredetermined carriage. In this form, three solar cell modules werefabricated at the same time. This variation was the same as the aboveapplication example, except that the three vacuum laminating apparatuseswere placed on the carriage. This example makes it possible to performefficient lamination.

A manufacturing apparatus for the solar cell module with the aboveconstitution has the characteristics of simple structure, easy offabrication of larger apparatus, shorter processing time, light weight,low cost, and high efficiency.

Note that the above example is one preferable example of the presentinvention, but the invention is not limited thereto, and may be subjectto various variations without departing from the spirit or scope of theinvention. For instance, while in this example, the vacuum laminatingapparatus was applied to the manufacture of the solar cell module, theobject of the lamination is not limited to the solar cell module.

As will be clear from the above description, a vacuum laminatingapparatus and method of the present invention is accomplished bydisposing the module material in a laminating space constituted of anannular body and a plate-like base member, and covering the entiresurface of the laminating space defined by the annular body with a lidmember. The heat treatment is conducted while vacuum is created in thelaminating space covered with the lid member. This procedure orconstitution is succinct and simple, making it possible to deal withlarge objects for processing, at higher speed, with shorter processingtime, lower cost, and lighter weight.

What is claimed is:
 1. A vacuum laminating method comprising the stepsof:preparing a vacuum laminating device having a substrate, a tube forforming a laminating processing space on the substrate, with the tubeenclosing the lamination processing space and having a deaeration holeon a side facing the lamination processing space, and a flexible lidmember disposed on the tube and the lamination processing space;mounting a lamination material in the lamination processing space of thevacuum laminating device; providing a cushioning member close to thetube in the lamination processing space, wherein the cushioning memberhas a thickness and shape such that said lid member gradually rises withthe diameter of said tube; drawing a vacuum in the lamination processingspace through the deaeration hole by a vacuum pump connected to thetube; laminating the lamination material by heating the vacuumlaminating device in an oven in a state when the vacuum pump is drawinga vacuum; cooling the vacuum laminating device by stopping the heatingafter the laminating step; putting the lamination processing space backin an atmospheric pressure by stopping to draw the vacuum after thecooling step; and taking the lamination material out of the laminationprocessing space.
 2. A method according to claim 1, wherein thelamination material includes a solar battery module component material.3. A method according to claim 2, wherein the solar battery modulecomponent material comprises a solar battery cell member, a fillermember, a surface coating member and a back side coating member.
 4. Amethod according to claim 3, wherein the back side coating memberincludes a steel plate.
 5. A method according to claim 3, wherein thesolar battery cell member includes an amorphous silicon.
 6. A methodaccording to claim 3, wherein the solar battery module componentmaterial is sandwiched by a filler flow preventing member when mountedon the lamination processing space.
 7. A method according to claim 1,wherein a mesh is provided in the lamination processing space on thesubstrate of the vacuum laminating device.
 8. A method according toclaim 7, wherein the mesh is comprised of metal or heat durable resin.9. A method according to claim 1, wherein a cross-sectional shape of thetube of the vacuum laminating device is circular or polygonal.
 10. Amethod according to claim 1, wherein the tube of the vacuum laminatingdevice is secured to the substrate by welding.
 11. A method according toclaim 1, wherein the tube of the vacuum laminating device is secured tothe substrate by a sealant.
 12. A method according to claim 1, whereinthe cushioning member is inclined as it approaches the tube.
 13. Avacuum laminating method comprising the steps of:preparing a vacuumlaminating device having a substrate, a tube for forming a laminatingprocessing space on the substrate, with the tube enclosing thelamination processing space and having a deaeration hole on a sidefacing the lamination processing space, and a flexible lid memberdisposed on the tube and the lamination processing space; mounting alamination material in the lamination processing space of the vacuumlaminating device; providing a cushioning member close to the tube inthe lamination processing space, wherein the cushioning member includesan L-shaped member; drawing a vacuum in the lamination processing spacethrough the deaeration hole by a vacuum pump connected to the tube;laminating the lamination material by heating the vacuum laminatingdevice in an oven in a state when the vacuum pump is drawing a vacuum;cooling the vacuum laminating device by stopping the heating after thelaminating step; putting the lamination processing space back in anatmospheric pressure by stopping to draw the vacuum after the coolingstep; and taking the lamination material out of the laminationprocessing space.
 14. A method according to claim 13, wherein thelamination material includes a solar battery module component material.15. A method according to claim 14, wherein the solar battery modulecomponent material comprises a solar battery cell member, a fillermember, a surface coating member and a back side coating member.
 16. Amethod according to claim 15, wherein the back side coating memberincludes a steel plate.
 17. A method according to claim 15, wherein thesolar battery cell member includes an amorphous silicon.
 18. A methodaccording to claim 15, wherein the solar battery module componentmaterial is sandwiched by a filler flow preventing member when mountedon the lamination processing space.
 19. A method according to claim 13,wherein a mesh is provided in the lamination processing space on thesubstrate of the vacuum laminating device.
 20. A method according toclaim 19, wherein the mesh is comprises of metal or heat durable resin.21. A method according to claim 13, wherein an axis connecting a centerof the tube and a center of the deaeration hole is at an angle θ of 0 to90 degrees, where the angle θ is defined at an intersection of the axisand a line normal to a surface of the substrate and extending throughthe center of the deaeration hole.
 22. A method according to claim 21,wherein the angle θ is 45 degrees.
 23. A method according to claim 13,wherein a cross-sectional shape of the tube of the vacuum laminatingdevice is circular or polygonal.
 24. A method according to claim 13,wherein the tube of the vacuum laminating device is secured to thesubstrate by welding.
 25. A method according to claim 13, wherein thetube of the vacuum laminating device is secured to the substrate by asealant.